Mostrar el registro sencillo del ítem

dc.contributor.authorOlaya, Jhon
dc.contributor.author Macias Ramirez, Hugo Alejandro
dc.contributor.authorAperador Chaparro, William Arnulfo
dc.contributor.authorYate, L
dc.contributor.authorL.E, Coy
dc.date.accessioned2021-12-07T21:56:42Z
dc.date.available2021-12-07T21:56:42Z
dc.date.issued2018-10-31
dc.identifier.urihttp://repositorio.ufps.edu.co/handle/ufps/1734
dc.description.abstractWe investigate the deposition of TiWSiNx thin films by means of the method of reactive magnetron co-sputtering, setting the nitrogen flow ratios N2/(Ar + N2) at 4.8%, 9.1%,16.7 and 33.3%. The crystallographic structure of the films was established through X-ray diffraction (XRD), the morphology and topography were evaluated through scanning electron microscopy (SEM) and atomic force microscopy (AFM), the chemical composition was evaluated through X-ray diffraction and X-ray photoelectron spectroscopy, the mechanical properties were evaluated by nanoindentation, and the wear resistance was studied via nanowear and pin-on-disk. It was found that films deposited between 4.8% and 16.7% nitrogen flow ratio exhibited an amorphous phase. As the nitrogen was increased, the films evolved into a mixture of amorphous Si3N4 and crystalline TiWN phase. Moreover, the film morphology changed to fine columnar as the nitrogen flow ratio increased. As a general observation, the hardness, resistance to plastic deformation (H3/E2), and residual stress of the samples increased as the nitrogen flow ratio increased. The maximum hardness, resistance to plastic deformation, and residual stress were 22 ± 0.4 GPa, 213 ± 20 MPa, and 1.4 ± 0.01, respectively. The lowest nanowear volume (0.47 µm3) and wear rate (11 ± 8 10−9 mm3/N mm) were obtained for films deposited at high nitrogen flow ratios. The lowest friction coefficient (0.15) was recorded for films deposited at 16.7% nitrogen flow ratio.eng
dc.format.mimetypeapplication/pdfspa
dc.language.isoengspa
dc.publisherApplied Surface Sciencespa
dc.relation.ispartofApplied Surface Science
dc.rights© 2018 Elsevier B.V. All rights reservedeng
dc.sourcehttps://www.sciencedirect.com/science/article/abs/pii/S0169433218316969spa
dc.titleEffect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiN x thin film deposited by magnetron co-sputteringeng
dc.typeArtículo de revistaspa
dc.identifier.doihttps://doi.org/10.1016/j.apsusc.2018.06.129
dc.publisher.placeBogota , Colombiaspa
dc.relation.citationeditionVol.456 (2018)spa
dc.relation.citationendpage456spa
dc.relation.citationstartpage445spa
dc.relation.citationvolume456spa
dc.relation.citesMacías, H. A., Yate, L., Coy, L. E., Olaya, J. J., & Aperador, W. (2018). Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering. Applied Surface Science, 456, 445-456.
dc.relation.ispartofjournalApplied Surface Sciencespa
dc.rights.accessrightsinfo:eu-repo/semantics/restrictedAccessspa
dc.subject.proposalCo-sputteringeng
dc.subject.proposalMechanical propertieseng
dc.subject.proposalTiWSiNx filmseng
dc.subject.proposalWeareng
dc.type.coarhttp://purl.org/coar/resource_type/c_6501spa
dc.type.contentTextspa
dc.type.driverinfo:eu-repo/semantics/articlespa
dc.type.redcolhttp://purl.org/redcol/resource_type/ARTspa
oaire.accessrightshttp://purl.org/coar/access_right/c_14cbspa
oaire.versionhttp://purl.org/coar/version/c_970fb48d4fbd8a85spa
dc.type.versioninfo:eu-repo/semantics/publishedVersionspa


Ficheros en el ítem

Thumbnail

Este ítem aparece en la(s) siguiente(s) colección(ones)

Mostrar el registro sencillo del ítem